Effect of Forced Liquid Cooling on the Voltage/Charge Displacement Characteristics of Stacked Piezoelectric Actuators during High-Frequency Drive

Piezoelectric stack actuators (PESAs) are widely used in applications requiring a fast response, high resolution, and accuracy. The self-heating of PESA during continuous drive with large amplitude at frequencies can change its voltage displacement charge characteristics. These changes lead to loss stability inaccurate positioning systems. In this paper, we confirmed that by using our proposed forced liquid cooling, the dynamic characteristics impedance due fact could be reduced. Voltage curve measurements 10 kHz demonstrated natural heat dissipation, increased 15% compared measured start driving but only 3% cooling. displacement-to-charge ratio decreased 12% room temperature while it 1% frequency response transfer function, changed gain phase first secondary vibration modes above 20 dissipation. Forced cooling also reduced variations function.